This free event is held in conjunction with the U-M Engineering Graduate Symposium.If you are interested in some of the Engineering Graduate Symposium events, please check here for the schedule of events.
This one-day event showcases the different research projects conducted in the Lurie Nanofabrication Facility. Posters and oral presentations by LNF users will be displayed in different technical sessions and available to all event participants. The event is aimed at researchers from academia and industry who are interested in learning about research being conducted in the LNF and possibly using the LNF capabilities.
Sessions will include the following topics:
• MEMS and microfluidics
• Materials
• Nanomaterials
• Solid State Electronics and Devices
As part of this event, we will also offer a short workshop on STS’s Deep Reactive Ion Etching (DRIE) Technology and Pegasus Systems for researchers who are interested. Deep silicon etching using the Bosch process has long been at the heart of much of the research that has occurred in the LNF. Recently we have purchased two new Pegasus etch systems from STS, which dramatically improves on the Bosch process capabilities in our facility. We will be holding a general introduction to this technology followed by a question and answer session to be lead by an applications engineer from STS.
The introductory session will last around 30 minutes and cover basics of the Bosch process as well as the capabilities of our new etch systems. The engineer will be available for one hour after to answer specific questions that you may have regarding these tools and their capabilities.
Participation in the LNF Research Showcase is free, but registration is required.
Online registration is available at here.
An updated draft of the agenda is available
here
Maps
Map of Ann Arbor area and UM North Campus
Parking Map of UM North Campus
Map of 1st floor of EECS building
Driving Directions
Street Address for the NC27 parking lot: 1226 Murfin, Ann Arbor, MI
From Plymouth Rd, Westbound:
• Turn Left on Murfin Rd
• Go straight at the stop sign and go downhill
• Enter the NC27 parking lot on the left. Make sure to park in a visitor space ($1/hr payable with credit card)
• Walk across the diag to the Electrical Engineering and Computer Science (EECS) building and room 1340, where the workshop is held.
From Plymouth Rd, Eastbound:
• Turn Right on Murfin Rd
• Go straight at the stop sign and go downhill
• Enter the NC27 parking lot on the left. Make sure to park in a visitor space ($1/hr payable with credit card)
• Walk across the diag to the Electrical Engineering and Computer Science (EECS) building and room 1340, where the workshop is held.
From Huron Parkway, Northbound (ie coming from Geddes Rd or Washtenaw Ave):
• Turn Left on Hubbard Ave
• Continue straight (Hubbard St becomes Hayward St) at the next two stop signs
• Turn Left at the next stop sign (Murfin Rd) and go downhill
• Enter the NC27 parking lot on the left. Make sure to park in a visitor space ($1/hr payable with credit card)
• Walk across the diag to the Electrical Engineering and Computer Science (EECS) building and room 1340, where the workshop is held.
For questions or more details, contact Brandon Lucas (bdlucas@umich.edu, 734-323-0285). or Sandrine Martin (sandrine@umich.edu, 734-763-6719).
