All materials and chemicals used in the Michigan Nanofabrication Facility are controlled to prevent contamination risks and ensure safety of all users.
If you wish to use a substrate or material that is currently not on the approved list, please follow the New Chemical Procedure.
Substrates
- Silicon
- Glass
- Pyrex 7740
- BoroFloat
- Borosilicate
- Corning 0211
- PGO: D 263
- Other
- Alumina
- Aluminum Nitride
- GaAs
- InP
- LiNbO3
- MgO
- Polycarbonate
- Quartz
- Sapphire (Al203)
- SiC
- ZnO
Other Materials and Chemicals
Under construction. Please check the approved SOPs for more information.