Past Workshops

Here are presentations from past seminars organized by the MNF:

DateTitleFiles
28 July 2005 Micro and Nano Fabrication lecture 1 - Introduction to Micro/NanoTechnology (6.22 mb)
lecture 2 - MNF capabilities (1.33 mb
1 June 2006 Wafer Bonding MNF Overview (3.15 mb)
MNF Wafer Bonding Capabilities (936.64kb)
Wafer Bonding Overview (7.08 mb
20 July 2006 Advanced Characterization Methods Lecture 1 (3.53 mb)
Lecture 2 (6.37 mb
28 September 2006 RIE / DRIE Lecture 1: Introduction (3.70 mb)
Lecture 2: RIE Physics and Technology (2.41 mb)
Lecture 3: DRIE and Bosch Process (6.19 mb)
Lecture 4: MNF Capabilities (408.31kb
24 October 2007 Nanotechnology and Microfabrication for Small Businesses Lecture 1: Nanoelectronic Devices (4.97 mb)
Lecture 2: NanoImprint Lithography (6.00 mb)
Lecture 3: NNIN and MNF (4.28 mb)
Lecture 4: MEMS (3.81 mb)
Lecture 5: RIE and Deep RIE (1.52 mb)
Lecture 6: Wafer Bonding (3.06 mb)
Lecture 7: Nanofabrication and Photonics (1.84 mb