|
Clean Room
|
|
|
Annealing
|
|
|
040010
|
A1, Sintering
|
No activity at the present time
|
Detailed Info
|
|
040000
|
D1, Anneal III- V Material
|
No activity at the present time
|
Detailed Info
|
|
041010
|
JetFirst-100 Forming
|
No activity at the present time
|
Detailed Info
|
|
041000
|
JetFirst-150 RTP
|
No activity at the present time
|
Detailed Info
|
|
Diffusion/Doping
|
|
|
110000
|
A2, Boron-dope
|
Being used by Seunghyun Lee for Processing
|
Detailed Info
|
|
110030
|
A4, Boron ANL/Oxide
|
No activity at the present time
|
Detailed Info
|
|
110010
|
B3, Phos-dope
|
No activity at the present time
|
Detailed Info
|
|
110020
|
B4 Phos ANL/Oxide
|
No activity at the present time
|
Detailed Info
|
|
Lithography
|
|
|
054040
|
ACS 200 cluster tool
|
No activity at the present time
|
Detailed Info
|
|
140020
|
EVG620 Bond Aligner
|
No activity at the present time
|
Detailed Info
|
|
051000
|
GCA AS200 AutoStep
|
No activity at the present time
|
Detailed Info
|
|
050020
|
MA/BA-6 Mask/Bond Aligner
|
No activity at the present time
|
Detailed Info
|
|
050101
|
MA6 Mask Aligner
|
No activity at the present time
|
Detailed Info
|
|
056000
|
Mask Maker
|
No activity at the present time
|
Detailed Info
|
|
050031
|
MJB3-#1
|
No activity at the present time
|
Detailed Info
|
|
050041
|
MJB3-#2
|
No activity at the present time
|
Detailed Info
|
|
052000
|
Raith-150 E-beam
|
No activity at the present time
|
Detailed Info
|
|
LPCVD
|
|
|
121000
|
C2, LTO
|
No activity at the present time
|
Detailed Info
|
|
030050
|
C3, LPCVD Poly-Si
|
No activity at the present time
|
Detailed Info
|
|
030020
|
C4, LPCVD SiO2/SiN
|
No activity at the present time
|
Detailed Info
|
|
030000
|
D2, Nitride and HTO
|
Being used by Zongliang Cao for Practice
|
Detailed Info
|
|
033000
|
D3, CVD Poly
|
No activity at the present time
|
Detailed Info
|
|
121010
|
D4, Clean LTO
|
No activity at the present time
|
Detailed Info
|
|
Metrology
|
|
|
081000
|
AutoEL Ellipsometer
|
No activity at the present time
|
Detailed Info
|
|
082010
|
Dektak 6 M Surface Profilometer
|
No activity at the present time
|
Detailed Info
|
|
084030
|
Flexus 2320-S
|
No activity at the present time
|
Detailed Info
|
|
084000
|
Miller FPP-5000 4-Point Probe
|
No activity at the present time
|
Detailed Info
|
|
080030
|
NanoSpec 6100
|
No activity at the present time
|
Detailed Info
|
|
080010
|
Zygo NewView 5000
|
No activity at the present time
|
Detailed Info
|
|
Oxidation
|
|
|
120010
|
B2, TCA-Oxidation
|
No activity at the present time
|
Detailed Info
|
|
120000
|
C1, Gate-Oxidation
|
No activity at the present time
|
Detailed Info
|
|
PECVD
|
|
|
021040
|
GSI PECVD
|
Being used by Russ Clifford for Repair
|
Detailed Info
|
|
Plasma Etch
|
|
|
010020
|
LAM 9400
|
No activity at the present time
|
Detailed Info
|
|
010051
|
Oxford ICP RIE
|
No activity at the present time
|
Detailed Info
|
|
010030
|
Plasmatherm 790
|
No activity at the present time
|
Detailed Info
|
|
014000
|
STS Deep Silicon Etcher
|
No activity at the present time
|
Detailed Info
|
|
012020
|
Trion Oracle RIE
|
Being used by Brian VanDerElzen for Repair
|
Detailed Info
|
|
015000
|
Xactix XeF2
|
No activity at the present time
|
Detailed Info
|
|
Plating
|
|
|
170030
|
Gold Plating Station
|
No activity at the present time
|
Detailed Info
|
|
PVD
|
|
|
062030
|
Cooke Evaporator
|
No activity at the present time
|
Detailed Info
|
|
062020
|
EnerJet Evaporator
|
No activity at the present time
|
Detailed Info
|
|
061040
|
EnerJet Sputter Coater
|
No activity at the present time
|
Detailed Info
|
|
062040
|
SJ-20 Evaporator
|
No activity at the present time
|
Detailed Info
|
|
062050
|
SJ-26 Evaporator
|
No activity at the present time
|
Detailed Info
|
|
Wafer Bonding
|
|
|
142001
|
CL200 Megasonic Cleaner
|
No activity at the present time
|
Detailed Info
|
|
140000
|
EVG501s bonder
|
No activity at the present time
|
Detailed Info
|
|
143001
|
nP12 nanoPREP
|
No activity at the present time
|
Detailed Info
|
|
141031
|
SB-6E Bonder
|
No activity at the present time
|
Detailed Info
|
|
Wet Benches
|
|
|
171010
|
Pre Furnace Clean
|
No activity at the present time
|
Detailed Info
|
|
MNF Offices
|
|
|
Offices
|
|
|
999999
|
Conf. Room (EECS 1340)
|
No activity at the present time
|
Detailed Info
|
|
Room 1412/SEM
|
|
|
Metrology
|
|
|
090000
|
Alessi probe station
|
No activity at the present time
|
Detailed Info
|
|
091010
|
HP4145 Parametric Analyzer
|
No activity at the present time
|
Detailed Info
|
|
091060
|
Keithley 4200
|
No activity at the present time
|
Detailed Info
|
|
Wet Chemistry
|
|
|
082031
|
HRP 200
|
No activity at the present time
|
Detailed Info
|
|
Packaging
|
|
|
130000
|
MA 1006 Dicing Saw
|
No activity at the present time
|
Detailed Info
|
|
132001
|
Scriber
|
No activity at the present time
|
Detailed Info
|
|
131001
|
Wire Bonder
|
No activity at the present time
|
Detailed Info
|
|
Polishing
|
|
|
160021
|
CMP IPEC-472
|
No activity at the present time
|
Detailed Info
|
|
161000
|
Lapper
|
No activity at the present time
|
Detailed Info
|
|
PVD
|
|
|
063000
|
PDS 2010
|
No activity at the present time
|
Detailed Info
|
|
Wet Benches
|
|
|
071181
|
Acid Bench
|
No activity at the present time
|
Detailed Info
|
|
071211
|
Acid Bench 4ft Organics
|
No activity at the present time
|
Detailed Info
|
|
071201
|
Acid Bench 8ft Organics
|
No activity at the present time
|
Detailed Info
|
|
190081
|
Base Bench
|
No activity at the present time
|
Detailed Info
|
|
071191
|
EDP Bench
|
No activity at the present time
|
Detailed Info
|
|
200051
|
Solvent Bench
|
No activity at the present time
|
Detailed Info
|
|
200061
|
Solvent Bench Organics
|
No activity at the present time
|
Detailed Info
|
|
Wet Clean
|
|
|
180001
|
Wafer Cleaner
|
No activity at the present time
|
Detailed Info
|